Laboratory Micro-/Nano-fabrication Facility
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Raith eLine electron beam lithography system
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Suss Microtec MJB4 mask aligner
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Oxygen Plasma System
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AJA ion milling system with Hiden SIMS element detector
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Nikon Eclipse upright optical microscope and Olympus stereo fluorescence microscope
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SS304 chemical benches for nanolithographic sample preparation