Laboratory Film Deposition and Processing Facility
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AJA eight-target Magnetron Sputtering Deposition System
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Six-target Magnetron Sputtering System
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Auto 306 E-beam Evaporator System
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Riber III-V semiconductor MBE System
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Home-built UHV Thermal Evaporator
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Home-built Magnetic Field Annealing System (in progress)