PH3601 Fabrication of Micro- and Nano-electronic Devices
Instructor: Lew Wen Siang
Office: SPMS-PAP-03-04
Phone: 6316 2963
Email: wensiang@ntu.edu.sg
Lecture/Tutorial hours : Semester 1 2018/2019 Wednesday 2.30-3.30 pm, Friday 10.30 am - 12.30pm
Lecture Venue: TR+1 (Wednesday and Friday)
Lab Demonstration: Wednesday 1.30-2.30 pm (Lab 01-01, Lab 05-12, Lab 01-08)
Course Objective:
This course aims to provide student a fundamental understanding of micro- and nano-electronic device fabrication. Students will learn techniques used in semiconductor device processing. The course prepares student for R&D and engineering manufacturing profession in microelectronics industry.
Reference Books:
“Fabrication Engineering at the Micro- and Nanoscale”, S A Campbell, OUP (2008).
“Silicon VLSI Technology”, J D Plummer et al., Prentice Hall (2000).
“Introduction to Microfabrication”, Sami Franssila, Wiley (2004).
“Fundamentals of Microfabrication and Nanotechnology”, M J Madou, 3rd ed CRC Press(2011).
“Handbook of Semiconductor Manufacturing Technology”, R Doering et al., CRC Press (2008).
Assessment:
| Final Examination | 60% | Restricted open book |
| Term Test 1 | 10% | Restricted open book |
| Term Test 2 | 10% | Restricted open book |
| Assignment | 20% | Report + Presentation |
Course outline:
| Lecture 1 | An Overview of Semiconductor Technology |
| Lecture 2 | Contamination Control |
| Lecture 3 | Semiconductor Wafer |
| Lecture 4 | Optical Lithography |
| Lecture 5 | Etching |
| Lecture 6 | Advanced Lithography Techniques |
| Lecture 7 | Impurity Doping |
| Lecture 8 | Thermal Oxidation |
| Lecture 9 | Vacuum Science and Technology |
| Lecture 10 | Physical Vapour Deposition |
| Lecture 11 | Chemical Vapour Deposition |
| Lecture 12 | Metallisation |
| Lecture 13 | Device Metrology |
| Lecture 14 | Device Packaging |
| Lecture 15 | Device Fabrication |